Chair:
Mehmet Kaynak (IHP, Germany)

Co-chairs:
Bernd Tillack (IHP/TU Berlin, Germany)
Thomas Geßner (Fraunhofer ENAS/
TU Chemnitz, Germany)

Technical Program Committee :
P. Ancey, ST Microelectronics
Ö. Aydin Çivi, METU
P. Blondy, XLIM
J.L. Cazaux, TAS
F. Coccetti, LAAS‐CNRS, NOVA MEMS
M. Dragoman, IMT
S. Demir, METU
L. Dussopt, CEA‐LETI
P. Farinelli, RF Microtech s.r.l
J. C.M. Hwang, Lehigh University
P. Kirby, University of Granfield
G. Konstantinidis, MRG—IESL FORTH
S. Kurth, Fraunhofer ENAS
C. Lanzieri, SELEX‐SI
R. Mansour, University of Waterloo
R. Marcelli, CNR‐IMM
B. Margesin, FBK
G. Papaioannou, NKUA
L. Pierantoni, Università Politecnica delle Marche
R. Plana, LAAS‐CNRS, Univ. Paul Sabatier
L. Pradell, UPC
A. Rydberg, University of Uppsala
H. Schumacher, University of Ulm
A. Skrivervik, EPFL
R. Sorrentino, Univ. Perugia
L. Tarricone, Univ. del Salento, Italy
H. Tilmans, IMEC
L. Vietzorreck, TU Munich
Steering committee:
Adrian Ionescu, EPFL
LausanneFlavio Giacomozzi, FBK
George Konstantinidis, MRG‐IESL, FORTH
Alexandru Muller, IMT
Robert Plana, LAAS UPS
Anders Rydberg, Univ. Uppsala
Herman Schumacher, Univ. Ulm
Roberto Sorrentino, Univ. Perugia
Harrie Tilmans, IMEC
Tauno Vaha‐Heikkila, Millilab‐VTT
Larizza Vietzorreck, TU Munich